Members of NanOp

AIXTRON AG, Aachen Dr. M. Heuken (Coordinator R&D)

AIXTRON was founded in 1983 and has grown rapidly since then to be nowadays the leading manufacturer of advanced MOVPE equipment for deposition of complex compound materials like semiconductors (III-V, II-VII), oxides (HTcSC, ferroelectrics), SiC, diamond, etc.. AIXTRON’s experience is based on more than 30 years of advanced MOVPE technology at the Technical University of Aachen and more than 14 years in the AIXTRON R&D laboratories. Its leading scientists have been involved in MOVPE for 19 years. AIXTRON is an SME with more than 140 employees at the headquarters and research laboratories in Aachen, Germany. The company is certified to operate a quality Assurance System under ISO 9001. Key patents in the field of MOVPE were hold by AIXTRON to protect the unique reactor design and the processes. ESPRIT and Brite-EuRam projects have been successfully carried out in collaboration with major European companies and Universities. The AIXTRON research laboratories comprise large clean room facilities equipped with four MOVPE reactors and related characterization tools. The main results were published in international journal and presented at conferences.