Members of NanOp Logo

UNIVERSITÄT ULM, Ulm, Abt. Optoelektronik
Prof Dr. K. J. Ebeling
Universität Ulm Logo

Research of the semiconductor device technology group at the Department focuses on quantum structure edge emitting and vertical cavity surface emitting laser diodes. Solid and gas source molecular beam epitaxy are employed for layer growth and novel selective oxidation techniques are preferably applied for lateral patterning with dimensions in the nanometer regime. The group is world-wide leading in the field of high performance and high power vertical cavity laser diodes and arrays. It was the first to employ extremely thin (~10 nm) oxide layers for lateral current and optical confinement in laser diodes and to demonstrate novel diode cascade quantum well vertical cavity laser diodes. The group intensively collaborates with industry (e.g. Daimler-Benz, Siemens, several  medium size companies) and research institutes (e.g. IAF Freiburg, FBH Berlin) via BMBF and EU projects and bilateral contracts.