Members of NanOp

UNIVERSITÄT WÜRZBURG, Physikalisches Institut, Mikrostrukturlabor Prof. A. Forchel

The Technische Physik group at Würzburg University operates one of the largest cleanroom laboratories at a German university, which is dedicated to nanostructure development for new semiconductor devices as well as to the investigation of dimensionality dependent physical phenomena. The group focuses on the development of nanostructures by high resolution electron beam lithography at high and low voltages (200 - 1 kV) and has realized and investigated e.g. nanostructures with widths down to 8 nm. Due to the potential regarding mass fabrication of nanostructures work on nano-imprinting is startin within the frame of an European collaboration. In addition, the cleanroom is equipped with focused ion beam systems for maskless implantation, molecular beam epitaxy systems for different III-V material systems, MOVPE for Ge(Si), dry etching, evaporation systems, UV mask aligner etc.. The group has a staff of about 45 including senior scientists, Ph.D. students, engineers and technicians.

The main achievements include

• fabrication of high performance single mode DFB InGaAs/AlGaAs and InGaAsP lasers based on gain coupling.
• InGaSb/AlGaSb vertical cavity emitting laser structures and edge emitting laser diodes and LED's for the 1.5 µm - 2 µm wavelength.
• electronic quantum dots and wires with lateral dimensions down to 8 nm for studies of changes of the energy band structures, exciton binding, recombination processes, etc.
• fabrication and investigation of photonic dots with fully size controlled optical modes.
• coupled photonic dots as building blocks of 1D and 2D photonic crystals, fabrication of 2D photonic band gap systems based on conventional waveguide layers

A large part of the research and development activities is carried out in national and international collaborations with a large number of university and research institutes as well as with major telecommunication companies Alcatel Alsthom Recherche, Alcatel Telecom, Daimler Benz Research, Siemens and Thomson.