Members of NanOp

Xenos Semiconductor Technologies GmbH, Kusterdingen Stefan Strähle

XENOS Semiconductor Technologies GmbH was founded in 2001 and provides tools, processes and services for semiconductor and nanotechnology, especially electron or focussed ion beam lithography.

Our product portolio of semiconductor lithography systems ranges from add-on writers retrofitting to Scanning Electron Microscopes (from low cost PC add-on card to dedicated high speed writer electronics) to fully equipped FIB and EBL systems.

Our lithography systems offer several different advantages which make us stand out from our competitors:

• high writing speeds of up to 40 MHz pixel frequency
  
  
• intelligent writing primitives, especially for optical devices, e.g. curved writing primitives generated by 3rd order spline approximations with full writing speed due to a dedicated polynomial generation hardware
  
  
• extreme flexibility for future-proof research applications: hard-, soft- and firmware can be easily upgraded within only minutes due to extensive use of programmable logic and sophisticated firmware- and kernel boot functions.
  
  
• user-friendly state-of-the-art software, developed in cooperation with experienced lithography users.

All the members of our team are highly qualified and skilful lithography and semiconductor technology experts. With the high flexibility of our advanced products, they can find the appropriate solutions for our customer's application problems.